Measures Thickness, TTV, Bow, Warp and site and global Flatness (ASTM compliance)
Measures all materials including Si, GaAs, Ge, InP, SiC
Full 500 micron thickness measurement range without re-calibration
2-D /3-D Mapping software
Sample sizes
3~8 inch
Measuring range
Thickness: 200 –1200μm
Bow : +/-350μm
Warp: 350μm
