For: Semiconductors, MEMS, Sensors, Microfluidics, IOT, Packaging
Built on the venerable OAI modular platform, the Series 6000 has frontside or backside alignment that is fully automated with sub-micron resolution which delivers performance that is unmatched at any price.
Wave Length 220nm-405nm
4-8inch
UV LED Light source
Proximity accuracy 3um
Soft contact accuracy 2um
Hard contact accuracy 1um
Vacuum contact accuracy 0.8um
Dual arm 4Axis Robot
Auto Balance
Through put 180wph
