Measurement of resistivity, thickness, conductivity(P/N) and temperature
Tester self-test function, wide measuring range
Thickness, measurement position and temperature correction function for silicon resistivity
Number of cassette station can be changed by customers request
Host (CIM) communication and SMIF or FOUP compatible
Sample
sizes
3 ~ 8 inch (or 12 inch)
Measuring range
[R] 100μ~1M Ω・cm
[RS] 1m~10M Ω/sq
