Automatic probe head selection(exchanger) among 4 kinds of probe head
[No need to exchange a probe head by each different sample measurement]
Edge 1mm measurement is available by dual meas. mode
High cost performance from high speed measurement
FOUP compatible, GEM / SECS compatible
Sample
sizes
~300mm(and/or Optional 200mm)
Measuring range
[RS] 1m~10M Ω/sq
