Thermo electrode and cold electrode is mounted detecting part of measuring probes
Possible to check most figure of sample such as single crystalline silicon
wafer, bulk, ingot and so on
Please select from 2 types;
1) 2 probe ver.(Hot probe, Cold
probe),
2) 1 probe ver.(Hot & Cold
probe)
Sample
sizes
more than 2 inch
Measuring range
PN Checking range in resistivity : 1m ~ 20k Ω・cm
Polycrystalline silicon、thin film
on wafer、MultiOxidized film on wafer surface are can not judgement
