Possible
to measure wide range of sheet resistance by installing Max. 4 probes Min. 7 mm position from edge can be
measured
User programable measurement pattern & programmable measuring pattern
Option: thickness measurement probe (for silicon wafer)
Sample
sizes
2 ~ 8 inch (Option; 12 inch)
Measuring range
[R] 1m ~ 200 Ω・cm
[RS] 10m ~ 3,000 Ω/sq
The range is separated from each Low, Middle, High and S-High probe
type.
