Easy operation and data processing by PC
No damage measurement by non-contact eddy current method
Replaceable probes by meas. range (*Second or more probe is for the
option)
1 point measurement of center position
5 types of model for each measuring range
Temperature correction for silicon wafer function
Sample
sizes
3 ~ 8 inch, ~156x156mm (Option; 2 inch and/or 12 inch, ~210x210mm)
Measuring range
[R] 1m ~ 200 Ω・cm
[RS] 10m ~ 3,000 Ω/sq
The range is separated from each Low, Middle, High and S-High probe
type.
