Auto-measurement
start by probe head contacting to sample
3 measurement modes for wafer resistivity, bulk resistivity and sheet
resistance
Easy set up to measurement condition by JOG dial
5 types of model for each measuring range
Resistivity probe can be changed by sample’s resistivity range
Sample
sizes
Any size and shape can be measured(*Larger than 20mmφ and measurement plane must be flat)
Measuring range
[R] 1m ~ 200 Ω・cm
[RS] 10m ~ 3,000 Ω/sq
The range is separated from each Low, Middle, High S-High,
Solar-wafer probe type.
