Easy operation and compact design
Auto-measurement start by inserting a wafer under the probe
Easy set up to measurement condition by JOG dial
5 types of model for each measuring range
Sample
sizes
~8 inch, ~156x156mm
Measuring range
[R] 1m ~ 200 Ω・cm
[RS] 10m ~ 3,000 Ω/sq
The range is separated from each Low, Middle, High and S-High probe
type.
